A Micro-Watt Second Order Filter for a Chopper Stabilized MEMS Pressure Sensor Interface
نویسندگان
چکیده
This paper describes a low-power second-order filter for a continuous-time chopper stabilized capacitive sensor interface, integrated with a fully differential post-CMOS surface-micromachined MEMS pressure sensor. The circuit uses a single-ended folded-cascode operational amplifier and two GM-C filters connected in cascade. The circuit is realized in a 0.18 μm CMOS process and offers differential to single-ended conversion. The novelty of the scheme is the cascade of two GM-C filters to achieve a second-order filter while minimizing power dissipation. The simulated filter cutoff frequency is 1.14 kHz at common-mode voltage 1.65 V, operating from a 3.3 V supply while dissipating 172μW of power. The filter achieves an operating range of 1V for an output load of 1MOhm and 10pF. Keywords—Chopper Stabilization, MEMS, Pressure Sensors, Low Pass Filter
منابع مشابه
Design of a Chopper Stabilized Variable Capacitive Sense Amplifier for a MEMS Probe-Based Data Storage System
Applications of MEMS variable capacitive sensors are introduced. The design trade-offs of variable capacitive sense amplifiers are discussed and a chopper stabilized variable capacitive sense amplifier topology is introduced. The chopper stabilized topology has the advantage of not being sensitive to 1/f noise, charge injection noise, kT/C noise, and dc offsets. This circuit was designed to mee...
متن کاملA 3-axis 12 bit CAN-compatible MEMS inertial sensor cluster for Vehicle Dynamics Control
A 3-axis 12-bit CAN-compatible MEMS inertial sensor cluster for vehicle dynamics control is presented. The sensor cluster can measure the x/y-axis accelerations and z-axis rotation. The MEMS sensing elements are fabricated using the sacrificial bulk micromachining (SBM) process. The sensor interface circuit is fabricated using a standard 0.18-μm CMOS process. The input capacitive amplifier adop...
متن کاملChopper Stabilized, Low-Power, Low-Noise, Front End Interface Circuit for Capacitive CMOS MEMS Sensor Applications
In this paper, a chopper stabilized fully differential CMOS pre-amplifier circuit is presented. The proposed circuit is designed for sub-atto Farad capacitive CMOS MEMS sensing applications. Chopper stabilization technique is employed to minimize flicker (1/f) noise and offsets in the circuit. The proposed circuit is designed using MIMOS 0.35 μm AMS CMOS 3.3 V technology and simulation results ...
متن کاملCmos Readout Interfaces for Mems Capacitive Microphones
This dissertation demonstrates the feasibility of three novel low-power and low-noise schemes for the readout interfaces of MEMS Capacitive Microphones (MCM) by presenting their detailed design descriptions and measurement results as application-specific ICs (ASIC) in CMOS technology developed to exploit their application scope in consumer electronics and hearing aids. MCMs are a new generation...
متن کاملSimulation and Modeling of a High Sensitivity Micro-electro-mechanical Systems Capacitive Pressure Sensor with Small Size and Clamped Square Diaphragm
This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...
متن کامل